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Silicon N-type4

Silicon N-type (矽晶片)

Silicon N-type

For LED Bonding Process
Specification
Item 2” silicon wafer 4” silicon wafer 6” silicon wafer
Diameter 50.8 ± 0.4 mm 100 ± 0. 5 mm 150 ± 0. 5 mm
Orientation <1-0-0> <1-0-0> <1-0-0>
Type N-type N-type N-type
Dopant As or P As or P As or P
Thickness 430± 20 um 430± 20 um 675± 20 um
Resistivity <0.0015 -cm="" strong=""> <0.0015 -cm="" strong=""> <0.0015 -cm="" strong="">
Particle Max. 30 (≧ 0.5µm) ppw Max. 30 (≧ 0.5µm) ppw Max. 30 (≧ 0.5µm) ppw
Front Side Surface Polished Polished Polished
Back Side Surface Etched Etched Etched