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藍寶石晶片 Sapphire Substrate (Al2O3)
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Substrate4

Sapphire Substrate (藍寶石晶片)

Substrate

2"/ 3"/ 4" Sapphire Specification
Specification Item 2" 3" 4" Unit
1.Surface Orientation C-plane(0001) C-plane(0001) C-plane(0001)  
1-1 Surface Orientation M 0.20±0.10 0.20±0.10 0.20±0.10 degree
1.2 Surface Orientation A 0.00±0.10 0.00±0.10 0.00±0.10 degree
2.Orientation Flat A-plane(11-20) A-plane(11-20) A-plane(11-20)  
2-1 Primary Flat 0.00±0.25 0.00±0.25 0.00±0.25 degree
2-2 Primary Flat Length 16.0±1.0 22.0±1.0 32.0±1.0 mm
3.Diameter 50.8±0.25 76.2±0.25 100.0±0.3 mm
4.Thickness 330/430±25 550±25 650±25 μm
5.TTV ≦10 ≦10 ≦15 μm
6.BOW -10~0 -10~0 -20~0 μm
7.WARP ≦10 ≦15 ≦15 μm
8.Front Surface Ra≦0.2 Ra≦0.3 Ra≦0.3 nm
9.Back Surface 0.8≦Ra≦1.2 0.8≦Ra≦1.2 0.8≦Ra≦1.2 μm