| 2" SiC Specification |
| Specification Item |
Grade I |
Grade II |
Grade III |
| 1.Surface Orientation |
on Axis C-plane(0001) ± 0.5 deg. |
| 2. Primary Flat Orientation |
Perpendicular (11-20) ± 5 deg. |
| 2-1 Primary Flat Length (mm) |
15.88 ± 1.65 |
| 2-2 Second Flat Orientation |
90° CW from Primary flat ± 0.5° |
| 2-3 Second Flat Length (mm) |
8 ± 1.65 |
| 3.Diameter (mm) |
50.8±0.3 |
| 4.Thickness |
330/430±25 or Customization |
| 5.TTV |
≦25 |
≦25 |
≦25 |
| 6.BOW |
≦25 |
≦25 |
≦25 |
| 7.WARP |
≦25 |
≦25 |
≦25 |
| 8.Micropipe Density (cm-2) |
＜10 |
＜30 |
＜50 |
| 9.FWHM |
＜30 arcsec |
＜50 arcsec |
＜70 arcsec |
| 10.Resistivity (Ω.cm) |
＞105 |
＞105 |
＞105 |
| 11.Surface finish si face |
CMP: Ra＜0.2 nm |
CMP: Ra＜0.3 nm |
CMP: Ra＜0.5 nm |
| 12.Surface finish c face |
Customer Spec. |
Customer Spec. |
Customer Spec. |
| 13.Usable area |
＞85% |
＞80% |
＞75% |
